Influence of Al-Si-N interlayer on residual stress of CVD diamond coatings; Surface and Coatings Technology; Vol. 357

Influence of Al-Si-N interlayer on residual stress of CVD diamond coatings; Surface and Coatings Technology; Vol. 357

التفاصيل البيبلوغرافية
Parent link:	Surface and Coatings Technology Vol. 357.— 2019.— [P. 348–352]
المؤلف الرئيسي:	Gaydaychuk A. V. Alexander Valerievich
مؤلفون مشاركون:	Национальный исследовательский Томский политехнический университет (ТПУ) Инженерная школа новых производственных технологий (ИШНПТ) Научно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий" (НПЛ ИПЭПТ), Национальный исследовательский Томский политехнический университет Исследовательская школа физики высокоэнергетических процессов
مؤلفون آخرون:	Zenkin S. P. Sergey Petrovich, Linnik S. A. Stepan Andreevich
الملخص:	Title screen Here we report the novel interlayer for the high-quality CVD diamond thin films with reduced residual stress. We used the novel sputtering technique of reactive high power impulse magnetron suttering (r-HiPIMS) which allows us to deposit high quality, void- and defect-free AlSiN interlayer films. The film based on Al-Si-N system shows fully amorphous structure at temperature of diamond film synthesis (800?°C), inertness to diamond and hard WC-Co alloy at elevated temperatures and reduction of the diamond macrostress up to ?0.25?GPa for film with AlSiN interlayer. Additionally, varying the Al content in Al-Si-N film we can finely tune its mechanical properties and total stress in substrate – AlSiN – diamond system. We show that AlSiN with the combination of its properties overcomes conventionally used interlayer materials for CVD-diamond such as transition metals or their nitrides and carbides. Режим доступа: по договору с организацией-держателем ресурса
اللغة:	الإنجليزية
منشور في:	2019
الموضوعات:	электронный ресурс труды учёных ТПУ остаточное напряжение алмазные пленки распыление
الوصول للمادة أونلاين:	https://doi.org/10.1016/j.surfcoat.2018.10.030
التنسيق:	الكتروني فصل الكتاب
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=658731

مواد مشابهة

The dynamic sublayers for improving the adhesion of CVD diamond films on copper; Energy Fluxes and Radiation Effects (EFRE-2016)
حسب: Gaydaychuk A. V. Alexander Valerievich
منشور في: (2016)

The dynamic sublayers for improving the adhesion of CVD diamond films on copper; Journal of Physics: Conference Series; Vol. 830 : Energy Fluxes and Radiation Effects 2016
حسب: Gaydaychuk A. V. Alexander Valerievich
منشور في: (2017)

The peculiarities of structural modificaions of CVD polycrystalline diamond coatings by heavy doping with boron; Energy Fluxes and Radiation Effects (EFRE-2016)
حسب: Okhotnikov V. V. Vitaly Vladimirovich
منشور في: (2016)

The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode; Journal of Physics: Conference Series; Vol. 830 : Energy Fluxes and Radiation Effects 2016
حسب: Linnik S. A. Stepan Andreevich
منشور في: (2017)

The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode; Energy Fluxes and Radiation Effects (EFRE-2016)
حسب: Linnik S. A. Stepan Andreevich
منشور في: (2016)

Tribological and mechanical properties of diamond films synthesized with high methane concentration; International Journal of Refractory Metals and Hard Materials; Vol. 85
حسب: Gaydaychuk A. V. Alexander Valerievich
منشور في: (2019)

New set up for diamond coatings deposition in AC glow discharge plasma on WC-Co milling cutters of complex shape; Diamond and Related Materials; Vol. 94
حسب: Linnik S. A. Stepan Andreevich
منشور في: (2019)

Research of reactive ion and plasma-chemical etching effect on diamond coating surface morphology; AIP Conference Proceedings; Vol. 1772 : Prospects of Fundamental Sciences Development (PFSD-2016)
حسب: Okhotnikov V. V. Vitaly Vladimirovich
منشور في: (2016)

Solid particle erosion of CVD diamond films deposited at different methane concentration; Wear; Vol. 494-495
منشور في: (2022)

Influence of Cobalt on the Adhesion Strength of Polycrystalline Diamond Coatings on WC–Co Hard Alloys; Technical Physics; Vol. 63, iss. 2
حسب: Linnik S. A. Stepan Andreevich
منشور في: (2018)

The Feasibility of Usage TiN and CrN Barrier Sublayers for Improving the Adhesion of Polycrystalline Diamond Films on WC-Co Hard Alloys; Key Engineering Materials; Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015)
حسب: Linnik S. A. Stepan Andreevich
منشور في: (2016)

Research of wear resistance of polycrystalline diamond coatings on hard alloys based on WC-Co; Современные материалы и технологии новых поколений
حسب: Khalafov R. D.
منشور في: (2019)

In Vitro Activity Assays of Sputtered HAp Coatings with SiC Addition in Various Simulated Biological Fluids; Coatings; Vol. 9, iss. 6
منشور في: (2019)

Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target; Surface and Coatings Technology; Vol. 324
منشور في: (2017)

Processing of heavy residual feedstock on Mo/Al[2]O[3]-catalytic systems obtained using polyoxomolybdate compounds; IOP Conference Series: Materials Science and Engineering; Vol. 597 : Prospects of Fundamental Sciences Development (PFSD-2019)
منشور في: (2019)

High-rate magnetron sputtering with hot target; Surface and Coatings Technology; Vol. 308 : The 43rd International Conference on Metallurgical Coatings and Thin Films
منشور في: (2016)

Glancing angle intermediate layer deposition approach for CVD diamond coating of high-speed steel substrates; Surfaces and Interfaces; Vol. 45
منشور في: (2024)

Hot target magnetron sputtering for ferromagnetic films deposition; Surface and Coatings Technology; Vol. 334
منشور في: (2018)

Hydrogen Sorption Kinetics of SiC-Coated Zr-1Nb Alloy; Coatings; Vol. 9, iss. 1
منشور في: (2019)

Irradiation of sputtered Al-Si-N coatings by pulsed 200 keV C+ion beam; Vacuum; Vol. 158
منشور في: (2018)

Tuning of mechanical properties of Ti1?xAlxN coatings through Ta alloying; Surface and Coatings Technology; Vol. 382
منشور في: (2020)

Определение остаточных напряжений при пластическом деформировании методом электротензометрии; Технический прогресс в машиностроении
حسب: Анфилофьев А. В.
منشور في: (1972)

The Research of Diamond Coatings Morphology Evolution under the Action of Reactive Ion Etching in Perpendicular Direction; Key Engineering Materials; Vol. 712 : Advanced Materials for Technical and Medical Purpose (AMTMP 2016)
حسب: Okhotnikov V. V. Vitaly Vladimirovich
منشور في: (2016)

Physical principles of radio-frequency magnetron sputter deposition of calcium-phosphate-based coating with tailored properties; Surface and Coatings Technology; Vol. 413
منشور في: (2021)

Floating harmonic probe for diagnostic of pulsed discharges; Surface and Coatings Technology; Vol. 357
منشور في: (2019)

Chromium coatings deposited by cooled and hot target magnetron sputtering for accident tolerant nuclear fuel claddings; Surface and Coatings Technology; Vol. 389
منشور في: (2020)

Incorporation of silver nanoparticles into magnetron-sputtered calcium phosphate layers on titanium as an antibacterial coating; Colloids and Surfaces B: Biointerfaces; Vol. 156
منشور في: (2017)

Combined HF+MW CVD Approach for the Growth of Polycrystalline Diamond Films with Reduced Bow; Coatings; Vol. 13, iss. 2
منشور في: (2023)

Bioceramic Coatings for Metallic Implants; Handbook of Bioceramics and Biocomposites
منشور في: (2016)

Mechanism of Protective Membrane Formation on the Surface of Metal-Bonded Diamond Disks; Applied Mechanics and Materials; Vol. 682 : Innovation Technology and Economics in Engineering
حسب: Yanyushkin А. S.
منشور في: (2014)

Effect of Glancing Angle Deposition to the Morphology of Calcium Phosphate Thin Coatings; Surface Modification of Materials by Ion Beams (SMMIB-2019)
منشور في: (2019)

Changes in the state of heat-resistant steel induced by repeated hot deformation; Metals and Materials International; Vol. 24, iss. 1
منشور في: (2018)

Контроль остаточной намагниченности деталей перед проведением сварочных работ; Дефектоскопия; № 3
حسب: Бакунов А. С.
منشور في: (2004)

Metal Coatings Deposition Using Hot Target Magnetrons; Surface Modification of Materials by Ion Beams (SMMIB-2019)
منشور في: (2019)

Deposition of Polycrystalline Diamond Films with a Controlled Grain Size by Periodic Secondary Nucleation; Materials Today: Proceedings; Vol. 3, supl. 2 : Diamond and Carbon Materials - DCM 2014
حسب: Linnik S. A. Stepan Andreevich
منشور في: (2016)

Deposition of Cr films by hot target magnetron sputtering on biased substrates; Surface and Coatings Technology; Vol. 350
منشور في: (2018)

The preparation of calcium phosphate coatings on titanium and nickel-titanium by rf-magnetron-sputtered deposition: Composition, structure and micromechanical properties; Surface and Coatings Technology; Vol. 202, iss. 16
منشور في: (2008)

Mechanical Behavior of the Titania Nanotubes and Hydroxyapatite Coating Prepared On the Surface of Titanium; 11th International Forum on Strategic Technology (IFOST 2016); Pt. 1
منشور في: (2016)

Управление формированием остаточных напряжений при изготовлении ответственных деталей
حسب: Киселев Е. С.
منشور في: (Санкт-Петербург, Лань, 2022)

Investigation of the applied voltage influence on the ionizing radiation particles detecting by diamond detectors; Перспективы развития фундаментальных наук; Т. 1 : Физика
حسب: Okhotnikov V. V. Vitaly Vladimirovich
منشور في: (2017)