Determination of Thickness Uniformity of Nickel Coatings Deposited on Zirconium Alloy by Magnetron Sputtering
| Parent link: | AIP Conference Proceedings Vol. 1899 : Prospects of Fundamental Sciences Development (PFSD-2017).— 2017.— [040008, 7 p.] |
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| Main Author: | |
| Corporate Authors: | , |
| Other Authors: | , |
| Summary: | Title screen In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 [mu]m was performed. The distribution map of the coating thickness over surface of 20•20 mm was constructed. The deposited coating with higher thickness of 2 [mu]m has 10% deviation of thickness. Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2017
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| Series: | Energy and power technologies in material science |
| Subjects: | |
| Online Access: | https://doi.org/10.1063/1.5009863 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657885 |
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| 200 | 1 | |a Determination of Thickness Uniformity of Nickel Coatings Deposited on Zirconium Alloy by Magnetron Sputtering |f Jingwen Qiao, A. O. Bezmaternykh, D. A. Sednev | |
| 203 | |a Text |c electronic | ||
| 225 | 1 | |a Energy and power technologies in material science | |
| 300 | |a Title screen | ||
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| 330 | |a In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 [mu]m was performed. The distribution map of the coating thickness over surface of 20•20 mm was constructed. The deposited coating with higher thickness of 2 [mu]m has 10% deviation of thickness. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\4816 |t AIP Conference Proceedings | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\24684 |t Vol. 1899 : Prospects of Fundamental Sciences Development (PFSD-2017) |o XIV International Conference of Students and Young Scientists, 25–28 April 2017, Tomsk, Russia |o [proceedings] |f National Research Tomsk Polytechnic University (TPU) ; eds. A. Yu. Godymchuk (Godimchuk), L. Rieznichenko |v [040008, 7 p.] |d 2017 | |
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| 700 | 0 | |a Jingwen Qiao | |
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| 701 | 1 | |a Sednev |b D. A. |c specialist in the field of non-destructive testing |c assistant of Tomsk Polytechnic University, Associate Scientist |f 1989- |g Dmitry Andreevich |2 stltpush |3 (RuTPU)RU\TPU\pers\34514 | |
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