Determination of Thickness Uniformity of Nickel Coatings Deposited on Zirconium Alloy by Magnetron Sputtering
| Parent link: | AIP Conference Proceedings Vol. 1899 : Prospects of Fundamental Sciences Development (PFSD-2017).— 2017.— [040008, 7 p.] |
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| Main Author: | |
| Corporate Authors: | , |
| Other Authors: | , |
| Summary: | Title screen In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 [mu]m was performed. The distribution map of the coating thickness over surface of 20•20 mm was constructed. The deposited coating with higher thickness of 2 [mu]m has 10% deviation of thickness. Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2017
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| Series: | Energy and power technologies in material science |
| Subjects: | |
| Online Access: | https://doi.org/10.1063/1.5009863 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657885 |