Determination of Thickness Uniformity of Nickel Coatings Deposited on Zirconium Alloy by Magnetron Sputtering

Determination of Thickness Uniformity of Nickel Coatings Deposited on Zirconium Alloy by Magnetron Sputtering

Bibliografski detalji
Parent link:AIP Conference Proceedings
Vol. 1899 : Prospects of Fundamental Sciences Development (PFSD-2017).— 2017.— [040008, 7 p.]
Glavni autor: Jingwen Qiao
Autori kompanije: Национальный исследовательский Томский политехнический университет Инженерная школа неразрушающего контроля и безопасности (ИШНКБ) Центр промышленной томографии (ЦПТ) Научно-производственная лаборатория "Бетатронная томография крупногабаритных объектов" (НПЛ БТКО), Национальный исследовательский Томский политехнический университет (ТПУ) Институт неразрушающего контроля (ИНК) Международная научно-образовательная лаборатория неразрушающего контроля (МНОЛ НК)
Daljnji autori: Bezmaternykh A. O. Anna Olegovna, Sednev D. A. Dmitry Andreevich
Sažetak:Title screen
In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 [mu]m was performed. The distribution map of the coating thickness over surface of 20•20 mm was constructed. The deposited coating with higher thickness of 2 [mu]m has 10% deviation of thickness.
Режим доступа: по договору с организацией-держателем ресурса
Jezik:engleski
Izdano: 2017
Serija:Energy and power technologies in material science
Teme:
электронный ресурс
труды учёных ТПУ
однородность
толщина
никелевые покрытия
циркониевые сплавы
магнетронное распыление
сканирующая электронная микроскопия
рентгенография
Online pristup:https://doi.org/10.1063/1.5009863
Format: Elektronički Poglavlje knjige
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657885
Opis
Sažetak:Title screen
In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 [mu]m was performed. The distribution map of the coating thickness over surface of 20•20 mm was constructed. The deposited coating with higher thickness of 2 [mu]m has 10% deviation of thickness.
Режим доступа: по договору с организацией-держателем ресурса
Digitalni identifikator objekta:10.1063/1.5009863

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