Determination of Thickness Uniformity of Nickel Coatings Deposited on Zirconium Alloy by Magnetron Sputtering; AIP Conference Proceedings; Vol. 1899 : Prospects of Fundamental Sciences Development (PFSD-2017)

Determination of Thickness Uniformity of Nickel Coatings Deposited on Zirconium Alloy by Magnetron Sputtering; AIP Conference Proceedings; Vol. 1899 : Prospects of Fundamental Sciences Development (PFSD-2017)

書誌詳細
Parent link:AIP Conference Proceedings
Vol. 1899 : Prospects of Fundamental Sciences Development (PFSD-2017).— 2017.— [040008, 7 p.]
第一著者: Jingwen Qiao
共著者: Национальный исследовательский Томский политехнический университет Инженерная школа неразрушающего контроля и безопасности (ИШНКБ) Центр промышленной томографии (ЦПТ) Научно-производственная лаборатория "Бетатронная томография крупногабаритных объектов" (НПЛ БТКО), Национальный исследовательский Томский политехнический университет (ТПУ) Институт неразрушающего контроля (ИНК) Международная научно-образовательная лаборатория неразрушающего контроля (МНОЛ НК)
その他の著者: Bezmaternykh A. O. Anna Olegovna, Sednev D. A. Dmitry Andreevich
要約:Title screen
In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 [mu]m was performed. The distribution map of the coating thickness over surface of 20•20 mm was constructed. The deposited coating with higher thickness of 2 [mu]m has 10% deviation of thickness.
Режим доступа: по договору с организацией-держателем ресурса
言語:英語
出版事項: 2017
シリーズ:Energy and power technologies in material science
主題:
электронный ресурс
труды учёных ТПУ
однородность
толщина
никелевые покрытия
циркониевые сплавы
магнетронное распыление
сканирующая электронная микроскопия
рентгенография
オンライン･アクセス:https://doi.org/10.1063/1.5009863
フォーマット: 電子媒体 図書の章
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=657885
その他の書誌記述
要約:Title screen
In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 [mu]m was performed. The distribution map of the coating thickness over surface of 20•20 mm was constructed. The deposited coating with higher thickness of 2 [mu]m has 10% deviation of thickness.
Режим доступа: по договору с организацией-держателем ресурса
DOI:10.1063/1.5009863

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