Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect; Measurement in Research and Industry

Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect; Measurement in Research and Industry

Bibliographic Details
Parent link:Measurement in Research and Industry.— 2015.— [5 р.]
Corporate Author: Национальный исследовательский Томский политехнический университет
Other Authors: Nesterenko T. G. Tamara Georgievna, Barbin E. S. Evgeny Sergeevich, Koleda A. N. Aleksey Nikolaevich, Arshinova A. A. Alisa A.
Summary:Title screen
Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
Language:English
Published: 2015
Subjects:
электронный ресурс
труды учёных ТПУ
МЭМС-акселерометры
упругие подвески
движущиеся массы
температурная чувствительность
Online Access:http://www.imeko.org/publications/wc-2015/IMEKO-WC-2015-TC22-435.pdf
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=656285

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