Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect

Bibliographic Details
Parent link:	Measurement in Research and Industry.— 2015.— [5 р.]
Corporate Author:	Национальный исследовательский Томский политехнический университет
Other Authors:	Nesterenko T. G. Tamara Georgievna, Barbin E. S. Evgeny Sergeevich, Koleda A. N. Aleksey Nikolaevich, Arshinova A. A. Alisa A.
Summary:	Title screen Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
Language:	English
Published:	2015
Subjects:	электронный ресурс труды учёных ТПУ МЭМС-акселерометры упругие подвески движущиеся массы температурная чувствительность
Online Access:	http://www.imeko.org/publications/wc-2015/IMEKO-WC-2015-TC22-435.pdf
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=656285

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