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656285 |
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20250915144751.0 |
| 035 |
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|a (RuTPU)RU\TPU\network\22726
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|a RU\TPU\network\11354
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|a 656285
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| 100 |
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|a 20171107d2015 k||y0rusy50 ba
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| 101 |
0 |
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|a eng
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| 102 |
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|a CZ
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| 135 |
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|a drcn ---uucaa
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| 181 |
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0 |
|a i
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| 182 |
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0 |
|a b
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| 200 |
1 |
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|a Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect
|f T. G. Nesterenko [et al.]
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| 203 |
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|a Text
|c electronic
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| 300 |
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|a Title screen
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| 320 |
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|a [References: 12 tit.]
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| 330 |
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|a Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
|
| 463 |
|
1 |
|t Measurement in Research and Industry
|o XXI IMEKO World Congress, 30 August - 4 September 2015, Prague, Czech Republic
|v [5 р.]
|o proceedings
|d 2015
|
| 610 |
1 |
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|a электронный ресурс
|
| 610 |
1 |
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|a труды учёных ТПУ
|
| 610 |
1 |
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|a МЭМС-акселерометры
|
| 610 |
1 |
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|a упругие подвески
|
| 610 |
1 |
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|a движущиеся массы
|
| 610 |
1 |
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|a температурная чувствительность
|
| 701 |
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1 |
|a Nesterenko
|b T. G.
|c specialist in the field of mechanical engineering
|c Associate Professor of Tomsk Polytechnic University, Candidate of technical sciences
|f 1946-
|g Tamara Georgievna
|3 (RuTPU)RU\TPU\pers\30970
|9 15208
|
| 701 |
|
1 |
|a Barbin
|b E. S.
|c specialist in the field of instrument engineering
|c engineer of Tomsk Polytechnic University
|f 1988-
|g Evgeny Sergeevich
|3 (RuTPU)RU\TPU\pers\36470
|
| 701 |
|
1 |
|a Koleda
|b A. N.
|c Specialist in the field of instrument making
|c Engineer of Tomsk Polytechnic University
|f 1985-
|g Aleksey Nikolaevich
|3 (RuTPU)RU\TPU\pers\33286
|9 17031
|
| 701 |
|
1 |
|a Arshinova
|b A. A.
|g Alisa A.
|
| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Институт неразрушающего контроля (ИНК)
|b Кафедра точного приборостроения (ТПС)
|3 (RuTPU)RU\TPU\col\18717
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20180221
|g RCR
|
| 856 |
4 |
|
|u http://www.imeko.org/publications/wc-2015/IMEKO-WC-2015-TC22-435.pdf
|
| 942 |
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|c CF
|
