Analysis of work and efficiency increase of of the ILUR-03 installation magnetron system for tubular specimens outer surface modification

Bibliographic Details
Parent link:Journal of Physics: Conference Series
Vol. 830 : Energy Fluxes and Radiation Effects 2016.— 2017.— [012058, 4 p.]
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра экспериментальной физики (ЭФ)
Other Authors: Kalin B. A., Volkov N. V., Valikov R. A., Yashin A. S., Krivobokov V. P. Valery Pavlovich, Yanin S. N. Sergey Nikolaevich, Yuriev Yu. N. Yuri Nikolaevich
Summary:Title screen
The method of material near-surface layers doping by mixing of alloying elements films with ion beam is widely used in science and technology. Three magnetrons with independent power systems, integrated in installation for ion-beam treatment of long-range products ILUR-03, were used as deposition systems. Targets for magnetrons were in the form of disks 60 mm diameter and 5 mm thickness and consisted of the following elements: Al, Fe, Mo, Zr, Cr of purity better than 99.99 at.%. Deposition was performed in argon atmosphere at 1-5 Pa pressure and room temperature in stable current mode at 30-100 mA. Analysis of the obtained films on the surface of cylindrical specimens from zirconium alloys with the outer diameter of 9.15 mm showed high uniformity of coating on length of 300 mm, good adhesion and absence of discontinuities in the films body.
Published: 2017
Series:Modification of materials with particle beams and plasma flows
Subjects:
Online Access:http://dx.doi.org/10.1088/1742-6596/830/1/012058
http://earchive.tpu.ru/handle/11683/39483
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=654911