Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target; Vacuum; Vol. 141
| Parent link: | Vacuum.— , 1951- Vol. 141.— 2017.— [P. 135–138] |
|---|---|
| Korporativní autor: | |
| Další autoři: | , , , , |
| Shrnutí: | Title screen Режим доступа: по договору с организацией-держателем ресурса |
| Jazyk: | angličtina |
| Vydáno: |
2017
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| Témata: | |
| On-line přístup: | https://doi.org/10.1016/j.vacuum.2017.04.001 |
| Médium: | Elektronický zdroj Kapitola |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=654548 |
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| 200 | 1 | |a Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target |f A. V. Yuryeva [et al.] | |
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