Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering

Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering

Manylion Llyfryddiaeth
Parent link:	Vacuum.— , 1951- Vol. 133.— 2016.— [P. 43–45]
Awdur Corfforaethol:	Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1
Awduron Eraill:	Musil Y. Yindrikh, Javdosnak D., Cerstvy R. Radomir, Haviar S., Remnev G. E. Gennady Efimovich, Uglov V. V. Vladimir Vasilievich
Crynodeb:	Title screen Режим доступа: по договору с организацией-держателем ресурса
Cyhoeddwyd:	2016
Pynciau:	электронный ресурс труды учёных ТПУ магнетронное распыление защитные покрытия Al-Si-N
Mynediad Ar-lein:	http://dx.doi.org/10.1016/j.vacuum.2016.08.014
Fformat:	Electronig Pennod Llyfr
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652991

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