Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering; Vacuum; Vol. 133

Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering; Vacuum; Vol. 133

Bibliografske podrobnosti
Parent link:	Vacuum.— , 1951- Vol. 133.— 2016.— [P. 43–45]
Korporativna značnica:	Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1
Drugi avtorji:	Musil Y. Yindrikh, Javdosnak D., Cerstvy R. Radomir, Haviar S., Remnev G. E. Gennady Efimovich, Uglov V. V. Vladimir Vasilievich
Izvleček:	Title screen Режим доступа: по договору с организацией-держателем ресурса
Jezik:	angleščina
Izdano:	2016
Teme:	электронный ресурс труды учёных ТПУ магнетронное распыление защитные покрытия Al-Si-N
Online dostop:	http://dx.doi.org/10.1016/j.vacuum.2016.08.014
Format:	Elektronski Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652991

Podobne knjige/članki

Thermal Stability of TiZrAlN and TiZrSiN Films Formed by Reactive Magnetron Sputtering; Inorganic Materials: Applied Research; Vol. 9, iss. 3
Izdano: (2018)

Structure, Mechanical and Optical Properties of Silicon-Rich Al–Si–N Films Prepared by High Power Impulse Magnetron Sputtering; Coatings; Vol. 9, iss. 1
Izdano: (2019)

Effect of Short-Pulsed 200 keV C+ Ion Beam and 350 keV He{2+} Ion Beam Irradiation on Optical Properties of Al-Si-N Coatings with a Various Si Content; Surface Modification of Materials by Ion Beams (SMMIB-2019)
Izdano: (2019)

Effect of N2 to total pressure ratio on the structure, mechanical and tribological properties of magnetron-sputtered Ti-Al-Ta-Si-N coatings; Surface and Coatings Technology; Vol. 492
Izdano: (2024)

Formation and structural features of nitrogen-doped titanium dioxide thin films grown by reactive magnetron sputtering; Applied Surface Science; Vol. 534
Izdano: (2020)

Improvement of Mechanical Properties and Adhesion of Ti-Al-Si-N Coatings by Alloying with Ta; Lubricants; Vol. 10 iss. 8
Izdano: (2022)

The oxygen-deficient TiO2 films deposited by a dual magnetron sputtering; Vacuum; Vol. 134
Izdano: (2016)

Hot target magnetron sputtering enhanced by RF-ICP source for CrNx coatings deposition; Vacuum; Vol. 191
Izdano: (2021)

Effect of short-pulsed 200 keV C+ ion beam and continuous 350 keV He2+ ion beam irradiation on optical properties of Al-Si-N coatings with a various Si content; Surface and Coatings Technology; Vol. 389
Izdano: (2020)

SiC- and Ag-SiC-Doped Hydroxyapatite Coatings Grown Using Magnetron Sputtering on Ti Alloy for Biomedical Application; Coatings; Vol. 12, iss. 2
Izdano: (2022)

Characterzations of nitrogen-doped titanium dioxide films prepared by reactive magnetron sputtering deposition; Energy Fluxes and Radiation Effects (EFRE-2016)
od: Pichugin V. F. Vladimir Fyodorovich
Izdano: (2016)

Novel entropy-stabilized ultra high temperature ceramics thin films prepared by magnetron sputtering; Современные материалы и технологии новых поколений
Izdano: (2019)

Effect of Al Addition on the Oxidation Resistance of HfC Thin Films; Coatings; Vol. 12, iss. 1
Izdano: (2022)

Structural features of N-containing titanium dioxide thin films deposited by magnetron sputtering; Thin Solid Films; Vol. 627
Izdano: (2017)

Behavior of AL-SI-N nanostructured coatings under the ions (HE{+}, AR{+}, Xe{+}[2] ) irradiation; Energy Fluxes and Radiation Effects (EFRE-2016)
Izdano: (2016)

Oxidation Performance of Nano-Layered (AlTiZrHfTa)Nx/SiNx Coatings Deposited by Reactive Magnetron Sputtering; Materials; Vol. 17, iss. 12
Izdano: (2024)

Thermal stability and oxidation resistance of ZrSiN nanocomposite and ZrN/SiNx multilayered coatings: A comparative study; Surface and Coatings Technology; Vol. 332
Izdano: (2017)

Effect of irradiation with continuous 28 MeV He2+ ion beam and short-pulsed 200 keV C+ ion beam on optical properties of multilayer Al-Si-N coatings; Radiation Effects and Defects in Solids; Vol. 176, iss. 3-4
Izdano: (2021)

Effect of high intensity short-pulsed ion irradiation on optical properties of multilayer coatings of aluminum and silicon nitrides; Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms; Vol. 494-495
Izdano: (2021)

Optical and AFM studies on p-SNS thin films deposited by magnetron sputtering; Chalcogenide Letters; Vol. 12, iss. 9
od: An V. V. Vladimir Vilorievich
Izdano: (2015)

Irradiation of sputtered Al-Si-N coatings by pulsed 200 keV C+ion beam; Vacuum; Vol. 158
Izdano: (2018)

Calcium-phosphate coating on AZ91d magnesium alloy prepared via RF magnetron sputtering; Перспективы развития фундаментальных наук
od: Мухаметкалиев Т. М. Тимур Мухамедрашидович
Izdano: (2015)

Effect of 28 MeV He{2+} Ion Beam and Short-Pulsed 200 keV C{+} Ion Beam Irradiation on Optical Properties of Multilayer Al-Si-N Coatings; Surface Modification of Materials by Ion Beams (SMMIB-2019)
Izdano: (2019)

Influence of Modifying Mixtures on Si Crystal Formation in Al-7%Si Alloy; Metals; Vol. 8, iss. 2
Izdano: (2018)

Magnetron sputtering in rigid optical solar reflectors production; Journal of Physics: Conference Series; Vol. 729 : Conference on Vacuum Technique and Technology
Izdano: (2016)

Thin Ni-YSZ films fabricated by magnetron co-sputtering used as anodes for solid oxide fuel cells; IFOST 2012; Vol. 1
Izdano: (2012)

Magnetron sputtering system; Физико-технические проблемы в науке, промышленности и медицине
od: Lazarev A. V.
Izdano: (2015)

Properties of ZnO:Al, ZnO:Al–SiO2 Films Obtained in Sol Gel Process from Coating Solutions; Russian Physics Journal; Vol. 63, iss. 4
od: Kuznetsova S. A. Svetlana Anatoljevna
Izdano: (2020)

Features of microstructure of ZrN, Si3N4 and ZrN/SiNx nanoscale films irradiated by Xe ions; Vacuum; Vol. 143
Izdano: (2017)

Application of magnetron sputtering for NiO/YSz anode layer of solid oxide fuel cell formation; Перспективы развития фундаментальных наук
od: Tcybenko A. O. Alena Olegovna
Izdano: (2013)

Investigating Thin Ti–O–N Films Deposited via Reactive Magnetron Sputtering; Bulletin of the Russian Academy of Sciences: Physics; Vol. 82, iss. 9
od: Boytsova E. L. Elena Lvovna
Izdano: (2018)

The effect of Si content on structure and mechanical features of silicon-containing calcium phosphorus-based films deposited by rf-magnetron sputtering on titanium substrate treated by pulsed electron beam; The 9th International Forum on Strategic Techology (IFOST-2014), September 21-23, 2014, Cox's Bazar, Bangladesh
Izdano: (2014)

Nitrogen-Doped Titanium Dioxide Thin Films Formation on the Surface of PLLA Electrospun Microfibers Scaffold by Reactive Magnetron Sputtering Method; Plasma Chemistry and Plasma Processing; Vol. 39, iss. 2
Izdano: (2019)

High-rate magnetron sputtering with hot target; Surface and Coatings Technology; Vol. 308 : The 43rd International Conference on Metallurgical Coatings and Thin Films
Izdano: (2016)

Novel entropy–stabilized ultra high temperature ceramics thin films prepared by magnetron sputtering; 6th International Congress on Energy Fluxes and Radiation Effects; 3rd International Conference on New Materials and High Technologies (3rd NMHT), November 2018
Izdano: (2018)

Comparison of characteristics of solid oxide fuel cells with YSZ and CGO film solid electrolytes formed using magnetron sputtering technique; Russian Journal of Electrochemistry; Vol. 52, iss. 7
Izdano: (2016)

Wettability of Thin Silicate-Containing Hydroxyapatite Films Formed by RF-Magnetron Sputtering; Russian Physics Journal; Vol. 56, iss. 10
Izdano: (2014)

Magnetron sputtering with hot solid target: thermal processes and erosion; Acta Polytechnica; Vol. 56, № 6
Izdano: (2016)

Energy Flux at the Substrate During Dual Magnetron Sputtering of TiAlN Coating; Russian Physics Journal; № 11 - Vol. 65
Izdano: (2023)

Study on the influence of the magnetron power supply on the properties of the Silicon Nitride films; Journal of Physics: Conference Series; Vol. 789 : Low temperature Plasma in the Processes of Functional Coating Preparation
Izdano: (2017)