Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering; Vacuum; Vol. 133
| Parent link: | Vacuum.— , 1951- Vol. 133.— 2016.— [P. 43–45] |
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| Corporate Author: | |
| Other Authors: | , , , , , |
| Summary: | Title screen Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1016/j.vacuum.2016.08.014 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652991 |
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| 320 | |a [References: p. 44-45 (16 tit.)] | ||
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| 463 | |t Vol. 133 |v [P. 43–45] |d 2016 | ||
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| 610 | 1 | |a Al-Si-N | |
| 701 | 1 | |a Musil |b Y. |c physicist |c Leading researcher of Tomsk Polytechnic University, Doctor of physical and mathematical sciences |f 1934- |g Yindrikh |3 (RuTPU)RU\TPU\pers\36957 | |
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