Protection from High-Velocity Impact Particles for Quartz Glass by Coatings on the Basis of Al-Si-N

Bibliographic Details
Parent link:AIP Conference Proceedings
Vol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016.— 2016.— [020018, 4 p.]
Corporate Author: Национальный исследовательский Томский политехнический университет
Other Authors: Bozhko I. A. Irina Aleksandrovna, Rybalko E. V., Fedorishcheva M. V. Marina Vladimirovna, Solntsev V. L., Cherniavsky A. G., Kaleri A. Yu., Psakhie S. G. Sergey Grigorievich, Sergeev V. P. Viktor Petrovich
Summary:Title screen
The paper presents the results of the research of the phase composition and the mechanical properties of the coatings on the basis of Al-Si-N system produced by pulsed magnetron sputtering on the KV glass substrates. By the X-ray diffraction method, it has been discovered that the coatings contain AlN phase (hcp) with different thickness. The deposition of Al-Si-N coating system allows both increasing the microhardness of the surface layer of the quartz glass up to 29 GPa, and maintaining high elastic properties (We > 0.70). The laboratory tests have been carried out involving the impact of high-speed flows of iron particles on the Al-Si-N protective coating with different thicknesses produced by pulsed magnetron sputtering. The increase of Al-Si-N coating thickness from 1μm to 10 [mu]m decreases 4-fold the surface density of the craters on the samples caused by a high-speed flow of iron particles.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2016
Subjects:
Online Access:http://dx.doi.org/10.1063/1.4966311
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652604