Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range; Review of Scientific Instruments; Vol. 86, iss. 12
| Parent link: | Review of Scientific Instruments Vol. 86, iss. 12.— 2015.— [123301, 6 p.] |
|---|---|
| مؤلفون آخرون: | , , , |
| الملخص: | Title screen The industrial quadrupole RGA-100 residual gas analyzer was modified for the research of electron beam-generated plasma at forevacuum pressure range. The standard ionizer of the RGA-100 was replaced by three electrode extracting unit. We made the optimization of operation parameters in order to provide the maximum values of measured currents of any ion species. The modified analyzer was successfully tested with beam plasma of argon, nitrogen, oxygen, and hydrocarbons. Режим доступа: по договору с организацией-держателем ресурса |
| اللغة: | الإنجليزية |
| منشور في: |
2015
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| الموضوعات: | |
| الوصول للمادة أونلاين: | http://dx.doi.org/10.1063/1.4937606 |
| التنسيق: | الكتروني فصل الكتاب |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652277 |
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| 200 | 1 | |a Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range |f D. V. Zolotukhin [et al.] | |
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| 320 | |a [References: 18 tit.] | ||
| 330 | |a The industrial quadrupole RGA-100 residual gas analyzer was modified for the research of electron beam-generated plasma at forevacuum pressure range. The standard ionizer of the RGA-100 was replaced by three electrode extracting unit. We made the optimization of operation parameters in order to provide the maximum values of measured currents of any ion species. The modified analyzer was successfully tested with beam plasma of argon, nitrogen, oxygen, and hydrocarbons. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Review of Scientific Instruments | ||
| 463 | |t Vol. 86, iss. 12 |v [123301, 6 p.] |d 2015 | ||
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| 701 | 1 | |a Tyunkov |b A. V. |g Andrey Vladimirovich | |
| 701 | 1 | |a Yushkov |b Y. G. |c electrophysicist |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1937- |g Yuri Georgievich |3 (RuTPU)RU\TPU\pers\25936 |9 11786 | |
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