Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range

Bibliographic Details
Parent link:	Review of Scientific Instruments Vol. 86, iss. 12.— 2015.— [123301, 6 p.]
Other Authors:	Zolotukhin D. V., Tyunkov A. V. Andrey Vladimirovich, Yushkov Y. G. Yuri Georgievich, Oks E. M.
Summary:	Title screen The industrial quadrupole RGA-100 residual gas analyzer was modified for the research of electron beam-generated plasma at forevacuum pressure range. The standard ionizer of the RGA-100 was replaced by three electrode extracting unit. We made the optimization of operation parameters in order to provide the maximum values of measured currents of any ion species. The modified analyzer was successfully tested with beam plasma of argon, nitrogen, oxygen, and hydrocarbons. Режим доступа: по договору с организацией-держателем ресурса
Language:	English
Published:	2015
Subjects:	электронный ресурс труды учёных ТПУ масс-анализаторы РГА плазменные пучки вакуум
Online Access:	http://dx.doi.org/10.1063/1.4937606
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=652277

Internet

http://dx.doi.org/10.1063/1.4937606