The Research of Diamond Coatings Morphology Evolution under the Action of Reactive Ion Etching in Perpendicular Direction; Key Engineering Materials; Vol. 712 : Advanced Materials for Technical and Medical Purpose (AMTMP 2016)

The Research of Diamond Coatings Morphology Evolution under the Action of Reactive Ion Etching in Perpendicular Direction; Key Engineering Materials; Vol. 712 : Advanced Materials for Technical and Medical Purpose (AMTMP 2016)

Bibliografiset tiedot
Parent link:Key Engineering Materials: Scientific Journal
Vol. 712 : Advanced Materials for Technical and Medical Purpose (AMTMP 2016).— 2016.— [P. 87-92]
Päätekijä: Okhotnikov V. V. Vitaly Vladimirovich
Yhteisötekijä: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Лаборатория № 1
Muut tekijät: Linnik S. A. Stepan Andreevich, Gaydaychuk A. V. Alexander Valerievich
Yhteenveto:Title screen
The evolution of the CVD diamond coatings morphology after perpendicular direction reactive ion etching was investigated. During the surface treatment, the average surface roughness was reduced. The efficiency of the etching decreases with the increasing of the processing time, until the surface roughness has been reduced by 30±5%. The height points spread over the surface were measured. The quality of the obtained films was investigated using the Raman spectroscopy.
Режим доступа: по договору с организацией-держателем ресурса
Kieli:englanti
Julkaistu: 2016
Sarja:Electrophysical and Electrochemical Methods and Technologies of Materials Treatment
Aiheet:
электронный ресурс
труды учёных ТПУ
алмазные покрытия
морфологическая эволюция
ионное травление
шероховатые поверхности
пленки
спектроскопия
комбинационное рассеяние
Linkit:http://dx.doi.org/10.4028/www.scientific.net/KEM.712.87
Aineistotyyppi: Elektroninen Kirjan osa
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=651262

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