The Research of Diamond Coatings Morphology Evolution under the Action of Reactive Ion Etching in Perpendicular Direction
| Parent link: | Key Engineering Materials: Scientific Journal Vol. 712 : Advanced Materials for Technical and Medical Purpose (AMTMP 2016).— 2016.— [P. 87-92] |
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| Summary: | Title screen The evolution of the CVD diamond coatings morphology after perpendicular direction reactive ion etching was investigated. During the surface treatment, the average surface roughness was reduced. The efficiency of the etching decreases with the increasing of the processing time, until the surface roughness has been reduced by 30±5%. The height points spread over the surface were measured. The quality of the obtained films was investigated using the Raman spectroscopy. Режим доступа: по договору с организацией-держателем ресурса |
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2016
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| Series: | Electrophysical and Electrochemical Methods and Technologies of Materials Treatment |
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| Online Access: | http://dx.doi.org/10.4028/www.scientific.net/KEM.712.87 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=651262 |