Effect of bias potential on the structure and distribution of elements in titanium-nitride coatings obtained by cathodic-arc deposition; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 10, iss. 3

Effect of bias potential on the structure and distribution of elements in titanium-nitride coatings obtained by cathodic-arc deposition; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 10, iss. 3

書誌詳細
Parent link:	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques Vol. 10, iss. 3.— 2016.— [P. 282-291]
共著者:	Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра общей физики, Национальный исследовательский Томский политехнический университет Энергетический институт Кафедра атомных и тепловых электростанций
その他の著者:	Kashkarov E. B. Egor Borisovich, Nikitenkov N. N. Nikolai Nikolaevich, Syrtanov M. S. Maksim Sergeevich, Sutygina A. N. Alina Nikolaevna, Gvozdyakov D. V. Dmitry Vasilievich
要約:	Title screen It is shown that a change in the pulsed bias potential in the process of the cathodic-arc deposition of titanium nitride has a significant effect on the structure and composition of coatings, as well as on the quantity of the microdroplet fraction. A bias potential of above 50 V leads to a decrease in the coating growth rate, which is related to resputtering of the coating by ions accelerated from the plasma. Режим доступа: по договору с организацией-держателем ресурса
言語:	英語
出版事項:	2016
主題:	электронный ресурс труды учёных ТПУ нитрид титана потенциал смещения титановые покрытия
オンライン･アクセス:	http://dx.doi.org/10.1134/S1027451016030265
フォーマット:	電子媒体図書の章
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=650603

インターネット

http://dx.doi.org/10.1134/S1027451016030265