Evaporation factor in productivity increase of hot target magnetron sputtering systems
| Источник: | Vacuum.— , 1951- Vol. 132.— 2016.— [P. 62-69] |
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| Автор-организация: | |
| Другие авторы: | , , , |
| Примечания: | Title screen The paper focuses on the investigation of thermal processes and erosion of hot solid Cr and Ti targets at the operation of power impulse magnetron sputtering systems (MSS). The role of evaporation and sublimation in the increase of atoms removal from targets with limited heat conduction has been clarified. For this purpose, mathematical simulation and experimental measurements of coatings deposition rate as well as optical emission spectra of discharge plasma were involved. Режим доступа: по договору с организацией-держателем ресурса |
| Язык: | английский |
| Опубликовано: |
2016
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| Предметы: | |
| Online-ссылка: | http://dx.doi.org/10.1016/j.vacuum.2016.07.030 |
| Формат: | Электронный ресурс Статья |
| Запись в KOHA: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649854 |
| Примечания: | Title screen The paper focuses on the investigation of thermal processes and erosion of hot solid Cr and Ti targets at the operation of power impulse magnetron sputtering systems (MSS). The role of evaporation and sublimation in the increase of atoms removal from targets with limited heat conduction has been clarified. For this purpose, mathematical simulation and experimental measurements of coatings deposition rate as well as optical emission spectra of discharge plasma were involved. Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.1016/j.vacuum.2016.07.030 |