Evaporation factor in productivity increase of hot target magnetron sputtering systems; Vacuum; Vol. 132
| Parent link: | Vacuum.— , 1951- Vol. 132.— 2016.— [P. 62-69] |
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| Collectivité auteur: | |
| Autres auteurs: | , , , |
| Résumé: | Title screen The paper focuses on the investigation of thermal processes and erosion of hot solid Cr and Ti targets at the operation of power impulse magnetron sputtering systems (MSS). The role of evaporation and sublimation in the increase of atoms removal from targets with limited heat conduction has been clarified. For this purpose, mathematical simulation and experimental measurements of coatings deposition rate as well as optical emission spectra of discharge plasma were involved. Режим доступа: по договору с организацией-держателем ресурса |
| Langue: | anglais |
| Publié: |
2016
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| Sujets: | |
| Accès en ligne: | http://dx.doi.org/10.1016/j.vacuum.2016.07.030 |
| Format: | Électronique Chapitre de livre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649854 |
| Résumé: | Title screen The paper focuses on the investigation of thermal processes and erosion of hot solid Cr and Ti targets at the operation of power impulse magnetron sputtering systems (MSS). The role of evaporation and sublimation in the increase of atoms removal from targets with limited heat conduction has been clarified. For this purpose, mathematical simulation and experimental measurements of coatings deposition rate as well as optical emission spectra of discharge plasma were involved. Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.1016/j.vacuum.2016.07.030 |