Evaporation factor in productivity increase of hot target magnetron sputtering systems

Bibliographic Details
Parent link:	Vacuum.— , 1951- Vol. 132.— 2016.— [P. 62-69]
Corporate Author:	Национальный исследовательский Томский политехнический университет Физико-технический институт
Other Authors:	Bleykher (Bleicher) G. A. Galina Alekseevna, Borduleva A. O. Alena Olegovna, Krivobokov V. P. Valery Pavlovich, Sidelev D. V. Dmitry Vladimirovich
Summary:	Title screen The paper focuses on the investigation of thermal processes and erosion of hot solid Cr and Ti targets at the operation of power impulse magnetron sputtering systems (MSS). The role of evaporation and sublimation in the increase of atoms removal from targets with limited heat conduction has been clarified. For this purpose, mathematical simulation and experimental measurements of coatings deposition rate as well as optical emission spectra of discharge plasma were involved. Режим доступа: по договору с организацией-держателем ресурса
Published:	2016
Subjects:	электронный ресурс труды учёных ТПУ титан хром испранение высокая мощность импульса
Online Access:	http://dx.doi.org/10.1016/j.vacuum.2016.07.030
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649854

Internet