Structure and properties of the Ti-Si-N nanocrystalline coatings synthesized in vacuum by the electroarc method

Bibliographic Details
Parent link:	Russian Physics Journal.— , 1965- Vol. 50, № 2.— 2007.— [P. 146-152]
Corporate Author:	Национальный исследовательский Томский политехнический университет (ТПУ)
Other Authors:	Koval N. N. Nikolay Nikolaevich, Ivanov Yu. F. Yuriy Fedorovich, Goncharenko I. M., Krysina O. V., Kolubaeva Yu. A., Koshkin K. A.
Summary:	Title screen Phase composition, defect substructure, and mechanical properties of the Ti-Si-N coating deposited on metal and ceramic-metal substrates by electroarc sputtering of the Ti-Si composite cathode in an ionized nitrogen atmosphere are investigated by the methods of modern materials science. It is established that coatings so formed with a thickness of ?1–3 µm are superhard (Hv ? 50 GPa), and have the nanocrystalline structure (with crystalline sizes D = 7 nm) based on titanium nitride ?-TiN. Режим доступа: по договору с организацией-держателем ресурса
Published:	2007
Subjects:	электронный ресурс труды учёных ТПУ структура свойства нанокристаллические покрытия вакуум
Online Access:	http://dx.doi.org/10.1007/s11182-007-0020-9
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649135

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