A plasma generator based on nonself-sustained low-pressure glow discharge with a large-volume hollow cathode
| Parent link: | Instruments and Experimental Techniques.— , 2000- Vol. 54, № 1.— 2011.— [P. 141-146] |
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| Other Authors: | , , , |
| Summary: | Title screen The results of studying nonself-sustained glow discharges in an electrode system with a hollow cathode with a volume of 0.25 m3 are presented. A high-current (up to 35 A) nonself-sustained glow discharge at low pressures (0.3–1.0 Pa) is initiated and sustained with the help of an auxiliary cold-hollow-cathode arc discharge. When the current of a nonself-sustained glow discharge increases from 2 to 35 A, its burning voltage changes from 40 to 300 V. These values are much lower than the voltage for a self-sustained glow discharge in the same electrode system. At a discharge current of 30 A, the electron concentration at the center of the hollow cathode is n e ~ 1010–1011 cm-3 and the electron temperature is T e 2 eV. The discharge considered can be used in the system for modification of materials and products. Режим доступа: по договору с организацией-держателем ресурса |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1134/S0020441211010179 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=649109 |