An arc generator of a broad plasma stream; Instruments and Experimental Techniques; Vol. 43, № 3

An arc generator of a broad plasma stream; Instruments and Experimental Techniques; Vol. 43, № 3

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Parent link:Instruments and Experimental Techniques.— , 2000-
Vol. 43, № 3.— 2000.— [P. 375-377]
Další autoři: Vintizenko L. G., Koval N. N. Nikolay Nikolaevich, Shchanin P. M., Tolkachev V. S.
Shrnutí:Title screen
The design and basic parameters of an arc plasma generator based on a combined cathode are described. The cathode consists of a hot tungsten filament located in the hollow cathode. A plasma stream with a cross section of 150?10 cm2 and a density of ?1010 cm?3 at a pressure of 0.1–1 Pa is generated at a discharge current of up to 60 A without a cathode spot. The plasma generator can be utilized for final cleaning and activation of surfaces of materials and articles before depositing functional coatings on them and in plasma-assisted deposition by using either vacuum arc or magnetron discharges.
Режим доступа: по договору с организацией-держателем ресурса
Jazyk:angličtina
Vydáno: 2000
Témata:
электронный ресурс
труды учёных ТПУ
On-line přístup:http://dx.doi.org/10.1007/BF02759038
Médium: Elektronický zdroj Kapitola
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648834

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