An arc generator of a broad plasma stream
| Parent link: | Instruments and Experimental Techniques.— , 2000- Vol. 43, № 3.— 2000.— [P. 375-377] |
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| Other Authors: | , , , |
| Summary: | Title screen The design and basic parameters of an arc plasma generator based on a combined cathode are described. The cathode consists of a hot tungsten filament located in the hollow cathode. A plasma stream with a cross section of 150?10 cm2 and a density of ?1010 cm?3 at a pressure of 0.1–1 Pa is generated at a discharge current of up to 60 A without a cathode spot. The plasma generator can be utilized for final cleaning and activation of surfaces of materials and articles before depositing functional coatings on them and in plasma-assisted deposition by using either vacuum arc or magnetron discharges. Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2000
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/BF02759038 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648834 |