An arc generator of a broad plasma stream; Instruments and Experimental Techniques; Vol. 43, № 3
| Parent link: | Instruments and Experimental Techniques.— , 2000- Vol. 43, № 3.— 2000.— [P. 375-377] |
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| Andre forfattere: | , , , |
| Summary: | Title screen The design and basic parameters of an arc plasma generator based on a combined cathode are described. The cathode consists of a hot tungsten filament located in the hollow cathode. A plasma stream with a cross section of 150?10 cm2 and a density of ?1010 cm?3 at a pressure of 0.1–1 Pa is generated at a discharge current of up to 60 A without a cathode spot. The plasma generator can be utilized for final cleaning and activation of surfaces of materials and articles before depositing functional coatings on them and in plasma-assisted deposition by using either vacuum arc or magnetron discharges. Режим доступа: по договору с организацией-держателем ресурса |
| Sprog: | engelsk |
| Udgivet: |
2000
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| Fag: | |
| Online adgang: | http://dx.doi.org/10.1007/BF02759038 |
| Format: | Electronisk Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648834 |
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| 200 | 1 | |a An arc generator of a broad plasma stream |f L. G. Vintizenko [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 330 | |a The design and basic parameters of an arc plasma generator based on a combined cathode are described. The cathode consists of a hot tungsten filament located in the hollow cathode. A plasma stream with a cross section of 150?10 cm2 and a density of ?1010 cm?3 at a pressure of 0.1–1 Pa is generated at a discharge current of up to 60 A without a cathode spot. The plasma generator can be utilized for final cleaning and activation of surfaces of materials and articles before depositing functional coatings on them and in plasma-assisted deposition by using either vacuum arc or magnetron discharges. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Instruments and Experimental Techniques |d 2000- | ||
| 463 | |t Vol. 43, № 3 |v [P. 375-377] |d 2000 | ||
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 701 | 1 | |a Vintizenko |b L. G. | |
| 701 | 1 | |a Koval |b N. N. |c specialist in the field of electronics |c Professor of Tomsk Polytechnic University, Doctor of technical sciences |f 1948- |g Nikolay Nikolaevich |3 (RuTPU)RU\TPU\pers\34748 |9 18098 | |
| 701 | 1 | |a Shchanin |b P. M. | |
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| 856 | 4 | |u http://dx.doi.org/10.1007/BF02759038 | |
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