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|a Aluminum films deposition by magnetron sputtering systems:Influence of target state and pulsing unit
|f D. V. Sidelev [et al.]
|
| 203 |
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|a Text
|c electronic
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|a Title screen
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|a This article reports on technological possibilities of magnetron sputtering systemswith solid-state and liquid targets to deposition of Al films and its structure. There is shown acomparing of deposition rate of magnetron sputtering systems with direct current (DC), midfrequency(MF) and high power pulsed (HiPIMS) supplies. The dependence of plasmacomposition, films stricture and sputtering technique parameters is obtained.
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| 463 |
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|t Optoelectronics, Photonics, Engineering and Nanostructures, OPEN 2016
|o Book of Abstracts 3rd International School and Conference, St Petersburg, Russia, March 28-30, 2016
|v [P. 571-572]
|d 2016
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| 610 |
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|a электронный ресурс
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|a труды учёных ТПУ
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|a Sidelev
|b D. V.
|c physicist
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1991-
|g Dmitry Vladimirovich
|y Tomsk
|3 (RuTPU)RU\TPU\pers\34524
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|b A. V.
|c specialist in the field of hydrogen energy and plasma technologies
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1983-
|g Alena Victorovna
|3 (RuTPU)RU\TPU\pers\33389
|9 17084
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| 701 |
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1 |
|a Krivobokov
|b V. P.
|c Russian physicist
|c professor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc)
|f 1948-
|g Valery Pavlovich
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|9 14757
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|a Shabunin
|b A. S.
|c Physicist
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|f 1987-
|g Artem Sergeevich
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|9 20132
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|a Syrtanov
|b M. S.
|c physicist
|c Associate Professor, Researcher of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1990-
|g Maksim Sergeevich
|3 (RuTPU)RU\TPU\pers\34764
|9 18114
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|a Koyshybaeva
|b Zh. K.
|g Zhanymgul Koyshybaykyzy
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|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Кафедра экспериментальной физики (ЭФ)
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|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Кафедра общей физики (ОФ)
|3 (RuTPU)RU\TPU\col\18734
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|b 63413507
|c 20160829
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|u http://spbopen.spbau.com/PDF/Book_of_Abstracts_SPBOPEN_2016.pdf#page=571
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| 942 |
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|c CF
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