Efficient arc sources of gas-discharge plasma in vacuum-plasma production facilities
| Parent link: | Известия вузов. Физика: научный журнал/ Национальный исследовательский Томский государственный университет (ТГУ).— , 1957- Т. 55, № 12-2.— 2012.— [С. 24-28] |
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| Other Authors: | , , , , , , , |
| Summary: | Заглавие с экрана Characteristics and design features of electrode systems for sources of gas-discharge plasmas based on an arc discharge in gas sustained by electron emission from a hot cathode are presented. A possibility of achieving high values of the parameters of plasma generated by the proposed sources in large volumes is shown, which determines the efficiency of these sources in vacuum-plasma production facilities. Режим доступа: по договору с организацией-держателем ресурса |
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2012
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| Online Access: | http://elibrary.ru/item.asp?id=20133301 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=648208 |