Effective processes for arc-plasma treatment in large vacuum chambers of technological facilities

Bibliografiske detaljer
Parent link:IEEE Transactions on Plasma Science.— , 1973-
Vol. 41, № 8.— 2013.— [P. 2183-2195]
Institution som forfatter: Национальный исследовательский Томский политехнический университет (ТПУ)
Andre forfattere: Borisov D. P., Koval N. N. Nikolay Nikolaevich, Korotaev A. D., Kuznetsov V. M., Romanov V. Y., Terekhov P. A., Chulkov E. V.
Summary:Title screen
Characteristics and design features of electrodesystems for sources of gas-discharge plasmas produced in anarc discharge in gas sustained by electron emission from a hotcathode and advanced vacuum-plasma facilities relying on themare presented. High values of the parameters and advantageousproperties of the plasmas generated by the proposed sourcesin large vacuum volumes are obtained. Effective techniquesand technological processes designed for surface modification ofmetal parts by the methods of cleaning, alloying (doping), andforming multicomponent composite coatings using low-pressurearc discharges are demonstrated.
Режим доступа: по договору с организацией-держателем ресурса
Udgivet: 2013
Fag:
Online adgang:http://dx.doi.org/10.1109/TPS.2013.2247777
Format: Electronisk Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647890

Lignende værker