Effective processes for arc-plasma treatment in large vacuum chambers of technological facilities
| Parent link: | IEEE Transactions on Plasma Science.— , 1973- Vol. 41, № 8.— 2013.— [P. 2183-2195] |
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| Other Authors: | , , , , , , |
| Summary: | Title screen Characteristics and design features of electrodesystems for sources of gas-discharge plasmas produced in anarc discharge in gas sustained by electron emission from a hotcathode and advanced vacuum-plasma facilities relying on themare presented. High values of the parameters and advantageousproperties of the plasmas generated by the proposed sourcesin large vacuum volumes are obtained. Effective techniquesand technological processes designed for surface modification ofmetal parts by the methods of cleaning, alloying (doping), andforming multicomponent composite coatings using low-pressurearc discharges are demonstrated. Режим доступа: по договору с организацией-держателем ресурса |
| Published: |
2013
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| Online Access: | http://dx.doi.org/10.1109/TPS.2013.2247777 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647890 |