Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 8, iss. 6

Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 8, iss. 6

Бібліографічні деталі
Parent link:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques: Scientific Journal
Vol. 8, iss. 6.— 2014.— [P. 1230-1234]
Співавтори: Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра общей физики, Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра экспериментальной физики
Інші автори: Nikitenkov N. N. Nikolai Nikolaevich, Kiseleva E. S. Evgeniya Sergeevna, Konishchev M. E. Maksim Evgenievich, Sypchenko V. S. Vladimir Sergeevich, Nikitenkov A. N. Aleksey Nikolaevich, Pichugin V. F. Vladimir Fyodorovich, Shulepov I. A. Ivan Anisimovich, Mattias E. Epple
Резюме:Title screen
The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.
Режим доступа: по договору с организацией-держателем ресурса
Мова:Англійська
Опубліковано: 2014
Предмети:
электронный ресурс
труды учёных ТПУ
Онлайн доступ:http://dx.doi.org/10.1134/S1027451014060391
Формат: Електронний ресурс Частина з книги
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647782

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