Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering

Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering

Detalles Bibliográficos
Parent link:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques: Scientific Journal
Vol. 8, iss. 6.— 2014.— [P. 1230-1234]
Corporate Authors: Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра общей физики, Национальный исследовательский Томский политехнический университет Физико-технический институт Кафедра экспериментальной физики
Outros autores: Nikitenkov N. N. Nikolai Nikolaevich, Kiseleva E. S. Evgeniya Sergeevna, Konishchev M. E. Maksim Evgenievich, Sypchenko V. S. Vladimir Sergeevich, Nikitenkov A. N. Aleksey Nikolaevich, Pichugin V. F. Vladimir Fyodorovich, Shulepov I. A. Ivan Anisimovich, Mattias E. Epple
Summary:Title screen
The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.
Режим доступа: по договору с организацией-держателем ресурса
Publicado: 2014
Subjects:
электронный ресурс
труды учёных ТПУ
Acceso en liña:http://dx.doi.org/10.1134/S1027451014060391
Formato: Electrónico Capítulo de libro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647782

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