Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering
| Parent link: | Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques: Scientific Journal Vol. 8, iss. 6.— 2014.— [P. 1230-1234] |
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| Corporate Authors: | , |
| Other Authors: | , , , , , , , |
| Summary: | Title screen The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used. Режим доступа: по договору с организацией-держателем ресурса |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1134/S1027451014060391 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647782 |