Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering; Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques; Vol. 8, iss. 6
| Parent link: | Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques: Scientific Journal Vol. 8, iss. 6.— 2014.— [P. 1230-1234] |
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| Corporate Authors: | , |
| Drugi avtorji: | , , , , , , , |
| Izvleček: | Title screen The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used. Режим доступа: по договору с организацией-держателем ресурса |
| Jezik: | angleščina |
| Izdano: |
2014
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| Teme: | |
| Online dostop: | http://dx.doi.org/10.1134/S1027451014060391 |
| Format: | Elektronski Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647782 |
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| 200 | 1 | |a Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering |f N. N. Nikitenkov [et al.] | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: p. 1234 (12 tit.)] | ||
| 330 | |a The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques |o Scientific Journal | ||
| 463 | |t Vol. 8, iss. 6 |v [P. 1230-1234] |d 2014 | ||
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| 701 | 1 | |a Nikitenkov |b N. N. |c physicist |c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences |f 1953- |g Nikolai Nikolaevich |3 (RuTPU)RU\TPU\pers\30409 |9 14751 | |
| 701 | 1 | |a Kiseleva |b E. S. |c physicist |c Senior Lecturer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1982- |g Evgeniya Sergeevna |y Tomsk |3 (RuTPU)RU\TPU\pers\31773 |9 21639 | |
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| 701 | 1 | |a Sypchenko |b V. S. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of Sciences |f 1987- |g Vladimir Sergeevich |3 (RuTPU)RU\TPU\pers\33791 |9 17389 | |
| 701 | 1 | |a Nikitenkov |b A. N. |c physicist, hydrogeologist |c associate Professor of Tomsk Polytechnic University, candidate of geological and mineralogical Sciences |f 1983- |g Aleksey Nikolaevich |3 (RuTPU)RU\TPU\pers\33263 |9 17008 | |
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