Dynamic processes happening during the evaporation of films of fusible materials

Bibliographic Details
Parent link:IOP Conference Series: Materials Science and Engineering
Vol. 110 : Radiation-Thermal Effects and Processes in Inorganic Materials (RTEP2015).— 2016.— [012089, 6 p.]
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ) Институт неразрушающего контроля (ИНК) Проблемная научно-исследовательская лаборатория электроники, диэлектриков и полупроводников (ПНИЛ ЭДиП)
Other Authors: Orlikov L. N., Orlikov N. L. Nikolay Leonidovich, Gyngazov (Ghyngazov) S. A. Sergey Anatolievich, Shandarov S. M.
Summary:Title screen
Optical waveguides on glass substrates are a promising area in their application in simple and cheap optoelectronic devices. As shown in [1], the highest refractive index is achieved during the formation of waveguides by oxidized film diffusion. However, realization of a number of electro-optical effects is restrained by probabilistic repeatability of wave guiding layers which holds down the development of optoelectronics [1-3]. This happens due to the fact that film formation in gas exchange mode isn't explored enough. One of the reasons of probabilistic repeatability of local thickness and film composition is dynamic processes which happen during the material evaporation. The regularities of evaporation, which were earlier found by Knudsen, Langmuir and other scientists for point sources, fail when it comes to the line where one material escape into another state. Most materials, which have three states - solid, liquid, gaseous - at ambient pressure heating, in vacuum, lose their liquid state partly or completely. Moreover, the film distribution over the substrate is quite unclear because of the poor study of molecular vapor flow and substrate interaction.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2016
Subjects:
Online Access:http://dx.doi.org/10.1088/1757-899X/110/1/012089
http://earchive.tpu.ru/handle/11683/18098
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=647060