MOCVD growth and study of magnetic Co films
| Parent link: | Surface Engineering Vol. 32, iss.1.— 2016.— [P. 8-14] |
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| Corporate Authors: | , |
| Other Authors: | , , , , , , , , |
| Summary: | Title screen The Co(N’acN’ac)2 complex, namely bis(2-methylamino-4-methyliminato-penten) cobalt(II), was for the first time used as a precursor for producing Co films via metal–organic chemical vapour deposition. This chelate exhibits good volatility ln?(P/P°)?=?26·45–14006·7/T(K) at moderate temperature values (382–427 K). Co films were grown on Si (100) substrates and studied by X-ray diffraction, extended X-ray absorption fine structure, atomic force and scanning electron microscopy, energy dispersive X-ray analysis and optical profilometry. Deposition conditions corresponding to the optimal electrical and magnetic characteristics of Co thin films are found. Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1179/1743294414Y.0000000424 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646835 |