Investigation of the Microstructure and Mechanical Properties of Si-Al-N Transparent Coatings

Bibliografske podrobnosti
Parent link:Key Engineering Materials: Scientific Journal
Vol. 683 : Multifunctional Materials: Development and Application.— 2016.— [P. 262-268]
Korporativna značnica: Национальный исследовательский Томский политехнический университет
Drugi avtorji: Bozhko I. A. Irina Aleksandrovna, Rybalko E. V., Fedorishcheva M. V. Marina Vladimirovna, Vorobiev Y. A., Magzhanov R. M., Chernyavsky A. G., Sergeev V. P. Viktor Petrovich
Izvleček:Title screen
Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.
Режим доступа: по договору с организацией-держателем ресурса
Jezik:angleščina
Izdano: 2016
Serija:Physicochemical Properties of Materials and Current Processing Technologies
Teme:
Online dostop:http://dx.doi.org/10.4028/www.scientific.net/KEM.683.262
Format: Elektronski Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646616

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