Investigation of the Microstructure and Mechanical Properties of Si-Al-N Transparent Coatings; Key Engineering Materials; Vol. 683 : Multifunctional Materials: Development and Application

Bibliografiske detaljer
Parent link:Key Engineering Materials: Scientific Journal
Vol. 683 : Multifunctional Materials: Development and Application.— 2016.— [P. 262-268]
Institution som forfatter: Национальный исследовательский Томский политехнический университет
Andre forfattere: Bozhko I. A. Irina Aleksandrovna, Rybalko E. V., Fedorishcheva M. V. Marina Vladimirovna, Vorobiev Y. A., Magzhanov R. M., Chernyavsky A. G., Sergeev V. P. Viktor Petrovich
Summary:Title screen
Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.
Режим доступа: по договору с организацией-держателем ресурса
Sprog:engelsk
Udgivet: 2016
Serier:Physicochemical Properties of Materials and Current Processing Technologies
Fag:
Online adgang:http://dx.doi.org/10.4028/www.scientific.net/KEM.683.262
Format: Electronisk Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646616

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