Investigation of the Microstructure and Mechanical Properties of Si-Al-N Transparent Coatings
| Parent link: | Key Engineering Materials: Scientific Journal Vol. 683 : Multifunctional Materials: Development and Application.— 2016.— [P. 262-268] |
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| Corporate Author: | |
| Other Authors: | , , , , , , |
| Summary: | Title screen Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples. Режим доступа: по договору с организацией-держателем ресурса |
| Published: |
2016
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| Series: | Physicochemical Properties of Materials and Current Processing Technologies |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.4028/www.scientific.net/KEM.683.262 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646616 |