Effect of Aluminum Content on the Performance of Coatings Based on Al-Si-N
| Parent link: | Key Engineering Materials: Scientific Journal Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 591-595] |
|---|---|
| Autor Corporativo: | |
| Outros autores: | , , , , |
| Summary: | Title screen The transparent coatings on the basis of Al- Si- N system with high Al content and the opaque Al-Si-N with a low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. Also the optical transmission was measured for all types of samples. Режим доступа: по договору с организацией-держателем ресурса |
| Idioma: | inglés |
| Publicado: |
2016
|
| Series: | Advanced Materials and Alloys, Nanomaterials and Nanotechnology |
| Subjects: | |
| Acceso en liña: | http://dx.doi.org/10.4028/www.scientific.net/KEM.685.591 |
| Formato: | Electrónico Capítulo de libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646491 |
MARC
| LEADER | 00000nla2a2200000 4500 | ||
|---|---|---|---|
| 001 | 646491 | ||
| 005 | 20251125144602.0 | ||
| 035 | |a (RuTPU)RU\TPU\network\11627 | ||
| 035 | |a RU\TPU\network\11626 | ||
| 090 | |a 646491 | ||
| 100 | |a 20160302a2016 k y0engy50 ba | ||
| 101 | 0 | |a eng | |
| 105 | |a y z 100zy | ||
| 135 | |a drcn ---uucaa | ||
| 181 | 0 | |a i | |
| 182 | 0 | |a b | |
| 200 | 1 | |a Effect of Aluminum Content on the Performance of Coatings Based on Al-Si-N |f I. A. Bozhko [et al.] | |
| 203 | |a Text |c electronic | ||
| 225 | 1 | |a Advanced Materials and Alloys, Nanomaterials and Nanotechnology | |
| 300 | |a Title screen | ||
| 330 | |a The transparent coatings on the basis of Al- Si- N system with high Al content and the opaque Al-Si-N with a low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. Also the optical transmission was measured for all types of samples. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\11477 |t Key Engineering Materials |o Scientific Journal | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\11478 |t Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015) |o The IV International Conference, April 21-24, 2015, Tomsk, Russia |o [proceedings] |f National Research Tomsk Polytechnic University (TPU) ; ed. N. V. Martyushev, A. M. Bogdan |v [P. 591-595] |d 2016 | |
| 610 | 1 | |a электронный ресурс | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a магнетронное распыление | |
| 610 | 1 | |a механические свойства | |
| 610 | 1 | |a нанокомпозитные покрытия | |
| 610 | 1 | |a оптические свойства | |
| 610 | 1 | |a структурно-фазовые состояния | |
| 610 | 1 | |a прозрачные покрытия | |
| 701 | 1 | |a Bozhko |b I. A. |c physicist |c Associate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences |f 1980- |g Irina Aleksandrovna |3 (RuTPU)RU\TPU\pers\34206 |9 17740 | |
| 701 | 1 | |a Rybalko |b E. V. | |
| 701 | 1 | |a Kalashnikov |b M. P. |c physicist |c Engineer of Tomsk Polytechnic University |g Mark Petrovich |3 (RuTPU)RU\TPU\pers\33561 | |
| 701 | 1 | |a Fedorishcheva |b M. V. |c physicist |c Associate Professor of Tomsk Polytechnic University, candidate of physical and mathematical sciences |f 1958- |g Marina Vladimirovna |3 (RuTPU)RU\TPU\pers\35812 | |
| 701 | 1 | |a Sergeev |b V. P. |c specialist in the field of materials science |c Professor of Tomsk Polytechnic University, doctor of technical Sciences |f 1949- |g Viktor Petrovich |3 (RuTPU)RU\TPU\pers\32730 |9 16615 | |
| 712 | 0 | 2 | |a Национальный исследовательский Томский политехнический университет |c (2009- ) |9 26305 |
| 801 | 2 | |a RU |b 63413507 |c 20160302 |g RCR | |
| 856 | 4 | |u http://dx.doi.org/10.4028/www.scientific.net/KEM.685.591 | |
| 942 | |c CF | ||