Effect of Aluminum Content on the Performance of Coatings Based on Al-Si-N

Bibliographic Details
Parent link:Key Engineering Materials: Scientific Journal
Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 591-595]
Corporate Author: Национальный исследовательский Томский политехнический университет
Other Authors: Bozhko I. A. Irina Aleksandrovna, Rybalko E. V., Kalashnikov M. P. Mark Petrovich, Fedorishcheva M. V. Marina Vladimirovna, Sergeev V. P. Viktor Petrovich
Summary:Title screen
The transparent coatings on the basis of Al- Si- N system with high Al content and the opaque Al-Si-N with a low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. Also the optical transmission was measured for all types of samples.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2016
Series:Advanced Materials and Alloys, Nanomaterials and Nanotechnology
Subjects:
Online Access:http://dx.doi.org/10.4028/www.scientific.net/KEM.685.591
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646491