Effect of Aluminum Content on the Performance of Coatings Based on Al-Si-N
| Parent link: | Key Engineering Materials: Scientific Journal Vol. 685 : High Technology: Research and Applications 2015 (HTRA 2015).— 2016.— [P. 591-595] |
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| Corporate Author: | |
| Other Authors: | , , , , |
| Summary: | Title screen The transparent coatings on the basis of Al- Si- N system with high Al content and the opaque Al-Si-N with a low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. Also the optical transmission was measured for all types of samples. Режим доступа: по договору с организацией-держателем ресурса |
| Published: |
2016
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| Series: | Advanced Materials and Alloys, Nanomaterials and Nanotechnology |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.4028/www.scientific.net/KEM.685.591 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=646491 |