Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope

Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope

Detalles Bibliográficos
Parent link:IOP Conference Series: Materials Science and Engineering
Vol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials.— 2015.— [012096, 8 p.]
Autor Corporativo: Национальный исследовательский Томский политехнический университет (ТПУ) Институт неразрушающего контроля (ИНК) Кафедра точного приборостроения (ТПС)
Outros autores: Nesterenko T. G. Tamara Georgievna, Vtorushin S. E., Барбин Е. С. Евгений Сергеевич, Koleda A. N. Aleksey Nikolaevich
Summary:Title screen
The aim of the research was to determine the effect of temperature on mechanical properties of a micromechanical gyroscope with the sensing element mounted on a silicon wafer, with the crystallographic orientation of (100) (110) (111). The research is of current relevancy since the metrological characteristics that depend on the eigenfrequencies over the full temperature range are to be controlled. The temperature-modal analysis of the micromechanical gyroscope model was performed with ANSYS program. The temperature dependence for eigenfrequencies was obtained. The dependence of the scale factor on temperature for the most temperature-independent variant of sensor positioning on the wafer was determined. The developed mathematical model was used to find the forms of the output oscillations of the gyroscope.
Режим доступа: по договору с организацией-держателем ресурса
Idioma:inglés
Publicado: 2015
Subjects:
электронный ресурс
труды учёных ТПУ
анизотропия
монокристаллический кремний
динамические характеристики
гироскопы
Acceso en liña:http://dx.doi.org/10.1088/1757-899X/81/1/012096
http://earchive.tpu.ru/handle/11683/14740
Formato: Electrónico Capítulo de libro
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=643027

Títulos similares

Títulos similares