Mechanisms of stress generation and relaxation in thin films and coatings

Бібліографічні деталі
Parent link:AIP Conference Proceedings
Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014.— 2014.— [P. 575-578]
Автор: Shugurov A. R. Artur Rubinovich
Інші автори: Panin A. V. Alexey Viktorovich
Резюме:Title screen
The failure modes of thin metal films and ceramic coatings induced by both intrinsic (growth) stresses and external effects (uniaxial tension, alternating bending, thermal treatment) were studied. Stress relaxation that causes soft films and hard coatings to fail was demonstrated to be governed by essentially the same mechanisms. The primary factor governing the reliability of thin-film structures was shown to be the strength of the film/substrate interface.
Опубліковано: 2014
Предмети:
Онлайн доступ:http://dx.doi.org/10.1063/1.4899010
http://earchive.tpu.ru/handle/11683/35754
Формат: Електронний ресурс Частина з книги
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641935
Опис
Резюме:Title screen
The failure modes of thin metal films and ceramic coatings induced by both intrinsic (growth) stresses and external effects (uniaxial tension, alternating bending, thermal treatment) were studied. Stress relaxation that causes soft films and hard coatings to fail was demonstrated to be governed by essentially the same mechanisms. The primary factor governing the reliability of thin-film structures was shown to be the strength of the film/substrate interface.
DOI:10.1063/1.4899010