Cellular automata modeling of microcrystalline structure formation; AIP Conference Proceedings; Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014
| Parent link: | AIP Conference Proceedings Vol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014.— 2014.— [P. 419-422] |
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| Riassunto: | Title screen The paper discusses the problem of microcrystalline structure formation during magnetron sputtering. The authors suggest the model based on cellular automata approach combined with chemical kinetics considerations, briefly discuss a practical way for kinetic constants evaluation and derive their accurate values. The work numerically solves a particular problem of coating formation by magnetron sputter deposition in multicomponent chemically active plasma. Режим доступа: по договору с организацией-держателем ресурса |
| Lingua: | inglese |
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2014
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| Accesso online: | http://dx.doi.org/10.1063/1.4898971 http://earchive.tpu.ru/handle/11683/35730 |
| Natura: | Elettronico Capitolo di libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641874 |
| Riassunto: | Title screen The paper discusses the problem of microcrystalline structure formation during magnetron sputtering. The authors suggest the model based on cellular automata approach combined with chemical kinetics considerations, briefly discuss a practical way for kinetic constants evaluation and derive their accurate values. The work numerically solves a particular problem of coating formation by magnetron sputter deposition in multicomponent chemically active plasma. Режим доступа: по договору с организацией-держателем ресурса |
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| DOI: | 10.1063/1.4898971 |