Volume Self–Sustained Discharge in Atmospheric Pressure Gas with High Pulse Repetition Frequency; Applied Mechanics and Materials; Vol. 756 : Mechanical Engineering, Automation and Control Systems (MEACS2014)
| Parent link: | Applied Mechanics and Materials: Scientific Journal Vol. 756 : Mechanical Engineering, Automation and Control Systems (MEACS2014).— 2015.— [P. 269-274] |
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| Main Author: | |
| Other Authors: | , |
| Summary: | Title screen The paper describes a plasma source based on a self-sustained volume discharge for diamond and diamond-like film deposition. The suggested scheme of the electrode system enables to provide stable combustion of the self-sustained volume discharge with high pulse repetition rate in atmospheric pressure gases. Gas flow rate to blow off the interelectrode gap depending on the anode temperature has been considered. Режим доступа: по договору с организацией-держателем ресурса |
| Language: | English |
| Published: |
2015
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| Series: | Material Engineering and Technologies |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.4028/www.scientific.net/AMM.756.269 |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641339 |
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| 200 | 1 | |a Volume Self–Sustained Discharge in Atmospheric Pressure Gas with High Pulse Repetition Frequency |f M. V. Zhuravlev, G. E. Remnev, B. G. Shubin | |
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| 225 | 1 | |a Material Engineering and Technologies | |
| 300 | |a Title screen | ||
| 330 | |a The paper describes a plasma source based on a self-sustained volume discharge for diamond and diamond-like film deposition. The suggested scheme of the electrode system enables to provide stable combustion of the self-sustained volume discharge with high pulse repetition rate in atmospheric pressure gases. Gas flow rate to blow off the interelectrode gap depending on the anode temperature has been considered. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 | |0 (RuTPU)RU\TPU\network\5920 |t Applied Mechanics and Materials |o Scientific Journal | |
| 463 | 0 | |0 (RuTPU)RU\TPU\network\6028 |t Vol. 756 : Mechanical Engineering, Automation and Control Systems (MEACS2014) |o International Conference, 16‐18 October, 2014, Tomsk, Russia |o [proceedings] |f National Research Tomsk Polytechnic University (TPU) |v [P. 269-274] |d 2015 | |
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