Volume Self–Sustained Discharge in Atmospheric Pressure Gas with High Pulse Repetition Frequency

Bibliographic Details
Parent link:Applied Mechanics and Materials: Scientific Journal
Vol. 756 : Mechanical Engineering, Automation and Control Systems (MEACS2014).— 2015.— [P. 269-274]
Main Author: Zhuravlev M. V. Mikhail Valerievich
Other Authors: Remnev (Remnyov) G. E. Gennady Efimovich, Shubin B. G. Boris Grigorievich
Summary:Title screen
The paper describes a plasma source based on a self-sustained volume discharge for diamond and diamond-like film deposition. The suggested scheme of the electrode system enables to provide stable combustion of the self-sustained volume discharge with high pulse repetition rate in atmospheric pressure gases. Gas flow rate to blow off the interelectrode gap depending on the anode temperature has been considered.
Режим доступа: по договору с организацией-держателем ресурса
Published: 2015
Series:Material Engineering and Technologies
Subjects:
Online Access:http://dx.doi.org/10.4028/www.scientific.net/AMM.756.269
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641339