Volume Self–Sustained Discharge in Atmospheric Pressure Gas with High Pulse Repetition Frequency; Applied Mechanics and Materials; Vol. 756 : Mechanical Engineering, Automation and Control Systems (MEACS2014)

Dades bibliogràfiques
Parent link:Applied Mechanics and Materials: Scientific Journal
Vol. 756 : Mechanical Engineering, Automation and Control Systems (MEACS2014).— 2015.— [P. 269-274]
Autor principal: Zhuravlev M. V. Mikhail Valerievich
Altres autors: Remnev (Remnyov) G. E. Gennady Efimovich, Shubin B. G. Boris Grigorievich
Sumari:Title screen
The paper describes a plasma source based on a self-sustained volume discharge for diamond and diamond-like film deposition. The suggested scheme of the electrode system enables to provide stable combustion of the self-sustained volume discharge with high pulse repetition rate in atmospheric pressure gases. Gas flow rate to blow off the interelectrode gap depending on the anode temperature has been considered.
Режим доступа: по договору с организацией-держателем ресурса
Idioma:anglès
Publicat: 2015
Col·lecció:Material Engineering and Technologies
Matèries:
Accés en línia:http://dx.doi.org/10.4028/www.scientific.net/AMM.756.269
Format: Electrònic Capítol de llibre
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641339