Structural Phase State and Mechanical Properties of the Si-Al-N Coatings with Different Concentration Ratio of Al and Si

Structural Phase State and Mechanical Properties of the Si-Al-N Coatings with Different Concentration Ratio of Al and Si

Bibliographic Details
Parent link:	Advanced Materials Research: Scientific Journal Vol. 1085 : Prospects of Fundamental Sciences Development (PFSD-2014).— 2015.— [P. 289-293]
Corporate Author:	Национальный исследовательский Томский политехнический университет
Other Authors:	Sergeev V. P. Viktor Petrovich, Fedorischeva M. V., Kalashnikov M. P. Mark Petrovich, Bozhko I. A. Irina Aleksandrovna, Voronov A. V., Ribalko E. V., Mironov Y. P.
Summary:	Title screen The amorphous and nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared by reactive magnetron sputtering method. Structural-phase state of coatings on the basis of Si-Al-N was investigated by TEM, SEM and X-ray analysis. Microhardness, modulus of elasticity, elastic recovery coefficient was determined by nanoindentation method. Режим доступа: по договору с организацией-держателем ресурса
Published:	2015
Series:	Structure Materials, Mechanics and Dynamics of Materials
Subjects:	электронный ресурс труды учёных ТПУ теплозащитные покрытия керамические покрытия магнетронное осаждение микроструктуры нанокомпозитные покрытия
Online Access:	http://dx.doi.org/10.4028/www.scientific.net/AMR.1085.289
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641222

Internet

http://dx.doi.org/10.4028/www.scientific.net/AMR.1085.289