Surface Morphology of Titanium Oxide and Oxynitride Coatings Deposited by Reactive Magnetron Sputtering

Surface Morphology of Titanium Oxide and Oxynitride Coatings Deposited by Reactive Magnetron Sputtering

Bibliographic Details
Parent link:	Advanced Materials Research: Scientific Journal Vol. 1085 : Prospects of Fundamental Sciences Development (PFSD-2014).— 2015.— [P. 134-138]
Corporate Author:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра теоретической и экспериментальной физики (ТиЭФ)
Other Authors:	Arysheva G. V. Galina Vladislavovna, Ivanova N. M. Nina Mikhailovna, Pustovalova A. A. Alla Aleksandrovna, Konishchev M. E. Maksim Evgenievich
Summary:	Title screen This paper presents the results of study of the surface morphology of thin (~ 200 nm) biocompatible coatings based on titanium oxide and oxynitride deposited by reactive magnetron sputtering for vascular stents made from stainless steel. The analysis of the roughness of the coating surface was performed for describe qualitatively their topography. Режим доступа: по договору с организацией-держателем ресурса
Published:	2015
Series:	Chemistry and Physics of Materials, Environmental Materials
Subjects:	электронный ресурс труды учёных ТПУ биосовместимые покрытия магнетронное распыление шероховатости оксид титана топография
Online Access:	http://dx.doi.org/10.4028/www.scientific.net/AMR.1085.134
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=641172

Internet

http://dx.doi.org/10.4028/www.scientific.net/AMR.1085.134