Model of the coating growth under the conditions of magnetron sputtering deposition; Russian Physics Journal; Vol. 53, iss. 1
| Parent link: | Russian Physics Journal Vol. 53, iss. 1.— 2010.— [P. 83-89] |
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| Hovedforfatter: | |
| Andre forfattere: | |
| Summary: | Title screen A mathematical model of a coating that grows during magnetron deposition is formulated and examined. The effect of the main technological and kinetic parameters on the coating growth dynamics is investigated. Режим доступа: по договору с организацией-держателем ресурса |
| Sprog: | engelsk |
| Udgivet: |
2010
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| Fag: | |
| Online adgang: | http://link.springer.com/article/10.1007%2Fs11182-010-9391-4?LI=true |
| Format: | MixedMaterials Electronisk Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=637951 |
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| 200 | 1 | |a Model of the coating growth under the conditions of magnetron sputtering deposition |f A. G. Knyazeva, S. A. Shanin | |
| 203 | |a Text |c electronic | ||
| 300 | |a Title screen | ||
| 320 | |a [References: p. 89 (8 tit.)] | ||
| 330 | |a A mathematical model of a coating that grows during magnetron deposition is formulated and examined. The effect of the main technological and kinetic parameters on the coating growth dynamics is investigated. | ||
| 333 | |a Режим доступа: по договору с организацией-держателем ресурса | ||
| 461 | |t Russian Physics Journal | ||
| 463 | |t Vol. 53, iss. 1 |v [P. 83-89] |d 2010 | ||
| 610 | 1 | |a электронный ресурс | |
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| 610 | 1 | |a numerical simulation | |
| 610 | 1 | |a численное моделирование | |
| 610 | 1 | |a растущие покрытия | |
| 610 | 1 | |a growing coating | |
| 700 | 1 | |a Knyazeva |b A. G. |c Russian physicist |c Professor of Tomsk Polytechnic University, doctor of physico-mathematical Sciences |f 1962- |g Anna Georgievna |3 (RuTPU)RU\TPU\pers\32712 | |
| 701 | 1 | |a Shanin |b S. A. |c physicist |c programmer, Senior Lecturer of Tomsk Polytechnic University, candidate of physico-mathematical Sciences |f 1985- |g Sergei Aleksandrovich |3 (RuTPU)RU\TPU\pers\33033 |9 16867 | |
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