Model of the coating growth under the conditions of magnetron sputtering deposition

Bibliographic Details
Parent link:	Russian Physics Journal Vol. 53, iss. 1.— 2010.— [P. 83-89]
Main Author:	Knyazeva A. G. Anna Georgievna
Other Authors:	Shanin S. A. Sergei Aleksandrovich
Summary:	Title screen A mathematical model of a coating that grows during magnetron deposition is formulated and examined. The effect of the main technological and kinetic parameters on the coating growth dynamics is investigated. Режим доступа: по договору с организацией-держателем ресурса
Published:	2010
Subjects:	электронный ресурс труды учёных ТПУ numerical simulation численное моделирование растущие покрытия growing coating
Online Access:	http://link.springer.com/article/10.1007%2Fs11182-010-9391-4?LI=true
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=637951

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