Коррозионные свойства хромовых покрытий: роль плазменного ассистирования при магнетронном распылении; Перспективы развития фундаментальных наук; Т. 1 : Физика
| Parent link: | Перспективы развития фундаментальных наук=Prospects of Fundamental Sciences Development: сборник научных трудов XIX Международной конференции студентов, аспирантов и молодых ученых, г. Томск, 26-29 апреля 2022 г./ Национальный исследовательский Томский политехнический университет (ТПУ) ; под ред. И. А. Курзиной, Г. А. Вороновой.— , 2022 Т. 1 : Физика.— 2022.— [С. 173-175] |
|---|---|
| Autore principale: | |
| Ente Autore: | |
| Altri autori: | , |
| Riassunto: | Заглавие с экрана This paper describes an effect of plasma assistance on corrosion properties of chromium coatings obtained by magnetron sputtering. It was found that plasma assistance results in 2-5 times increase in polarization resistance depending on the type of sputtering target. The most pronounced effect of plasma assistance is observed for high-rate coating deposition using magnetron sputtering with a “hot” target. |
| Lingua: | russo |
| Pubblicazione: |
2022
|
| Soggetti: | |
| Accesso online: | http://earchive.tpu.ru/handle/11683/72926 |
| Natura: | Elettronico Capitolo di libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=634698 |
| Riassunto: | Заглавие с экрана This paper describes an effect of plasma assistance on corrosion properties of chromium coatings obtained by magnetron sputtering. It was found that plasma assistance results in 2-5 times increase in polarization resistance depending on the type of sputtering target. The most pronounced effect of plasma assistance is observed for high-rate coating deposition using magnetron sputtering with a “hot” target. |
|---|