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|a i
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|a Features of self-sustained magnetron sputtering of evaporating metal target
|f G. A. Bleykher [et al.]
|
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|a Текст
|c электронный
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|a Заглавие с титульного экрана
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|0 (RuTPU)RU\TPU\conf\32407
|t Gas Discharge Plasmas and Their Applications (GDP 2019)
|o 14th International Conference, September 15–21, 2019, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU) ; eds. Yu. D. Korolev, N. N. Koval
|v [С. 277]
|d 2019
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|a электронный ресурс
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|a труды учёных ТПУ
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|a магнетронное распыление
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|a металлические мишени
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|a магнетроны
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|a осаждение
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|a покрытия
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|a самораспыление
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|a магнетронные распылительные системы
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|a Bleykher (Bleicher)
|b G. A.
|c physicist
|c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences
|f 1961-
|g Galina Alekseevna
|3 (RuTPU)RU\TPU\pers\31496
|9 15657
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|a Yuryeva
|b A. V.
|c specialist in the field of hydrogen energy and plasma technologies
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1983-
|g Alena Victorovna
|3 (RuTPU)RU\TPU\pers\33389
|9 17084
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|a Shabunin
|b A. S.
|c Physicist
|c Engineer of Tomsk Polytechnic University
|f 1987-
|g Artem Sergeevich
|3 (RuTPU)RU\TPU\pers\37139
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|a Sidelev
|b D. V.
|c physicist
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1991-
|g Dmitry Vladimirovich
|y Tomsk
|3 (RuTPU)RU\TPU\pers\34524
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|a Grudinin
|b V. A.
|c physicist
|c engineer of Tomsk Polytechnic University
|f 1995-
|g Vladislav Alekseevich
|3 (RuTPU)RU\TPU\pers\42519
|9 21548
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|a Национальный исследовательский Томский политехнический университет
|b Инженерная школа ядерных технологий
|b Научно-образовательный центр Б. П. Вейнберга
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|u http://earchive.tpu.ru/handle/11683/57759
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