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|a High-rate deposition of chromium coatings by magnetron sputtering
|f D. V. Sidelev [et al.]
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|t Gas Discharge Plasmas and Their Applications (GDP 2019)
|o 14th International Conference, September 15–21, 2019, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU) ; eds. Yu. D. Korolev, N. N. Koval
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|d 2019
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|a электронный ресурс
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|a высокоскоростное осаждение
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|a подложки
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|a Sidelev
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|b Инженерная школа ядерных технологий
|b Научно-образовательный центр Б. П. Вейнберга
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