Formation of the silicon coating on the NiTi substrate by magnetron sputteringi; Gas Discharge Plasmas and Their Applications (GDP 2019)

Formation of the silicon coating on the NiTi substrate by magnetron sputteringi; Gas Discharge Plasmas and Their Applications (GDP 2019)

Bibliographic Details
Parent link:	Gas Discharge Plasmas and Their Applications (GDP 2019).— 2019.— [С. 190]
Main Author:	Luchin A. V.
Corporate Author:	Томский политехнический университет
Other Authors:	Krukovskii K. V., Kashin O. A.
Summary:	Заглавие с титульного экрана
Language:	English
Published:	2019
Subjects:	электронный ресурс труды учёных ТПУ формирование покрытия подложки магнетронное распыление кремний
Online Access:	http://earchive.tpu.ru/handle/11683/57739
Format:	Electronic Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=630872

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